Re: breakdown voltage in MEMS structures (shay kaplan)
Ning Wu (nwu@Princeton.EDU)
2007-10-13
Ashwini,
Just give you a rule of thumb: the dielectric breakdown of air (under normal
condition) is 3*10^6 V/m. To be more accurate, you have to consider what Shay
said.
Ning Wu
The Department of Chemical Engineering
Princeton University
New Jersey 08544