Dear Giancarlo,
Thanks a lot for your response.
Can you please give me some more details about protek? How dose it work (like
wax?) and where I can get it?
Do you think wax is unable to resist KOH for long KOH etching? I need to have
a long KOH etch for a 500 um Si bulk to remain a 10 um thinkness silicon
membrance with 1mm by 1mm square.
Best regards
Lawrence
CANAVESE GIANCARLO 說:
Dear Chin-Jen Chiang
I think that protek is better than black wax for koh wet
etching protection.
Giancarlo Canavese