Miss Ghazal,
No it oxidizes rapidly and turns black. It may be possible
to alternately oxidise with an Oxygen plasma then eat the oxide with a
Hydrogen containing gas or ammonia.
Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA 94551-5152
(925) 373-8353
www.yieldengineering.com
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Hakemi, Ghazal
Sent: Thursday, January 24, 2008 1:40 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Copper
Dear all,
I have a chemistry-related question : does copper etch away in oxygen
plasma?