>Hi all,
>I wonder if there is any kind of photoresist (or any kind of chemical
>that can be spinned and cured)
>that can be etched by XeF2 ?
>Has anybody observed any other material reacting with XeF2 other than
>Si, Poly, some Si3N4's and a few well known metals ?
>Thanks..
I'm not sure, but you may want to try a new UV cure epoxy available from
Epoxy Technologies.
Justin.
Justin D. Mansell | "If your opponent strikes with fire,
Ginzton Laboratory | counter with water."
Stanford, CA 94305 | "To injure an opponent is to injure
tel: 650-725-2266 | yourself."
fax: 650-723-2666 | -Morihei Ueshiba
http://www.stanford.edu/~jmansell|