There are numerous wet etchants for silicon, amorphous or otherwise.
Examples include HF/HNO3 KOH, TMAH and EDP. The one that is "THE" wet
etchant might depend on your application.
Roger Shile
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Haixin Zhu
Sent: Wednesday, March 12, 2008 3:12 PM
To: General MEMS discussion
Subject: [mems-talk] wet etch of LPCVD amorphous Silicon
Dear all,
I am looking for the wet etchant for LPCVD a-Si, anyone has suggestion?
Thanks
Michael