Hi, MEMS guys:
We want to deposit 3um PZT film upon Pt/Ti/SiO2/Si using sol-gel. Anyone
knows vendors of materials of precursor solution, commercial PZT micro-sized
or nano-sized powder? Review paper recommendation is also welcome. Many
thanks for your kindly suggestion.
Regards.
Teng Ma
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Graduate Student
School of Electromechanical Engineering
University of Electronic Science and Technology of China
North Jianshe Road, Chengdu, P.R.China
Mobile: +86-13730668144
Office: +8602883205198