I'm looking for a general reference which goes through some of the
experimental results from plasma / RIE machines. I need information like
etch rates for various recipes, selectivites, etc. Can anyone recommend a
reference book covering this material?
Thanks,
Justin.
--
Justin D. Mansell |
129D Escondido Village | "Only a risk tests the reality of a belief."
Stanford, CA 94305 | -C. S. Lewis
(650)497-9236 |