hello, colleague
It might be silly question to somebody.
but I think it's impossible.
Is there anybody who try to deposit some film at very low temperature.
In PECVD plasma usually occur a little high temp because mobility of
electrons are better as temperature higher.
I think it'll possible ,if there is something to break the eletron orbit
from nuclear.
If there is anybody to make a new process , would you join me and
make revolution.
with thanks.