Hi:
I plan to do spin coating on a silicon wafer. Polyimide UR3 100 and
UR3 140 are discribed in the papers I read. But I can not find them.
Does anyone know where I can find them?
Thanks for help.
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Gang Sun
Department of Physics
Wayne State University
666 W. Hancock St.
Detroit, MI 48201
email: gangsun1969@yahoo.com
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