Silicon wet etch can be affected by light - especially of it is not highly
doped. The reaction need available electrons and light provides e/h pairs
-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Moshe
Sent: Wednesday, July 16, 2008 11:11 AM
To: mems-talk@memsnet.org
Subject: Re: [mems-talk] TMAH solution photosensitivity
But the main question remain - if any of TMAH solutions affected by light ?
Just now I start to work with the TMAH and I also want to know the answer.
Thank you