E-beam direct patterning of SAM layer on ITO coated
glass substrates
li shifeng
2009-02-12
Hi, All
I've read literature that talks about E-beam direct patterning of SAM layer on
the silicon substrates. I am just wondering if I can do similar patterning on
the ITO coated glass substrates.
Has anyone done similar research or have any comments?
Thanks!
shifeng