Pradeep, use Nickel as the adhesion layer. Electroplate and sinter in.
Woods nickel strike, sulfamate nickel plate. Gary
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of mikas remeika
Sent: Monday, June 29, 2009 3:41 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Oxidation of Molybdenum
Here's a website that has a lot of info on etching recipes:
http://www.ee.byu.edu/cleanroom/wet_etch.phtml
On Mon, Jun 29, 2009 at 1:26 AM, Pradeep Dixit wrote:
> Hello Everyone,
>
> I would like to check something with you:
>
> 1. Has any one tried to electroplate copper on a Molybdenum seed layer ?
>
> 2. I think, Molybdenum oxidizes easily. Does anyone have an idea on how
> to remove Molybdenum oxide ? wet etching or dry plasma etching?