anisotropic etching of silicon having aluminium pattern
tarun mudgal
2009-08-20
Dear all,
I want to fabricate a diaphragm, in that regard i need to etch silicon
anisotropically having aluminum metal pads already patternized on the silicon
wafer.
Now, since aluminium also gets etch in TMAH or KOH therefore I am facing a
stalemate.
If anybody has any ideas or suggestions it would be very helpful.
Thanks
Tarun Mudgal