You should be able to, provided the linewidths are ~2 microns, at least using a
recipe that I submitted last week. I've lifted off 5000 A Nb (and 200 nm Al/Pd)
using it with sharp lines. I'll resend if I can find it.
________________________________________
From: mems-talk-bounces@memsnet.org [mems-talk-bounces@memsnet.org] On Behalf Of
Chih-Chieh Cheng [chih-chieh.cheng@asu.edu]
Sent: Tuesday, August 25, 2009 3:51 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Lift-off 8000 A gold using PR 5214
Hello everyone,
As title, has anyone ever tried lift-off 8000 A gold (or any other metal)
using PR 5214? The thickness of gold is relatively thick so I am wondering
it may not work perfectly.
Thanks for your time.
CC