Hi Igor
Your Seedless Ni Electroplating tool looks very impressive. Do you have such
type of tool for Cu also? If yes, how much it cost it and where can I get it?
With regards,
Pramod Gupta
21084 Red Fir Court
Cupertino, CA 95014
Phone: (408) 253-1646
--- On Tue, 10/13/09, Igor Kadija wrote:
From: Igor Kadija
Subject: Re: [mems-talk] Electroplating question
To: "General MEMS discussion"
Date: Tuesday, October 13, 2009, 2:13 PM
Lin,
You should look into the works done by MESA Research Institute, University of
Twente, The Netherlands, http://www.fibrotools.com/articles-and-reviews.html,
article #5. They successfully implemented direct electroplating on highly doped
Si by a simple modification of a commecial plating tool.
Igor Kadija