Hi Qiu,
Sometime back I was working on these kind of structures and I was using
CTP-100 Negative tone photoresist from Clariant.
With exposure gaps of ~ 4-6 micron I was getting profiles with angles
ranging from 45 to 70 degrees.
sudesh
>
> Dear All,
>
> We are trying to get the vertical taper PR profile with 8mm size and =
> 0-1.5um thickness. Can anyone give us some suggestion? We want to avoid =
> a grey scale mask, since they are so costly.
>
> Thanks a lot
>
> Qiu