Hi,
While I see e-beam as a recommended technique for depositing tungsten
thin film, I have not been able to find a reference for what type of
crucible to use. Could someone suggest crucible type? Any other
particulars about e-beam of tungsten one should be aware of?
Am also considering sputtering. Is tungsten particularly difficult to
sputter, as compared to say titanium?
Thank you,
Linas.