How to improve adhesion of resist to a metal surface
Paul Nguyen
2009-11-24
Dear ALL,
Beside best surface cleanliness pre-coating, what other techniques would
improve adhesion of photoresist (very thick up to 100um) to a metal surface,
in particular a NiCo surface? I would appreciate input from MEMS experts.
Happy Thanksgiving to ALL!
Best regards,
Paul Nguyen