Hi y'all
I am trying to make some resistor on my Silicon wafers. I am thinking
of using TaN -- here are my questions -- hope you can help:
1) Any vendor in Silicon valley that can do the film for me?
2) Do people normally do a lift-off or wet/dry etch on the film?
3) I am thinking of putting the metal layer after the TaN --
is that the correct order? Do I need to do any sort of
plasma clean before I deposit the metal on top the TaN
to make contact?
4) Should I passivate the TaN with a dielectric?
Thanks,
Zard