Hi all,
I need some suggestions for the following fabrication objective:
Using AZ 9260 positive resist, I would like to achieve thickness for ~ 20 um
and the smallest feature size is 10um.
I am facing some problems in the soft bake, exposure dose and development of
the patterns.
I would be obliged if I can get some recipe that I could use as a reference.
Thanking you in anticipation,
Anirban