http://grover.mirc.gatech.edu/processing/Etchants.pdf
Sorry about the broken link. It should work now.
Regards,
Dave Lewis
Sensor R&D
Lake Shore Cryotronics
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Andy Irvine
Sent: Tuesday, February 16, 2010 12:32 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Wet-chemical etching of Au without etching Al
The link doesn't work for me, Dave. Could you check?