Suprem.
Suprem will not give you DRIE per say but etching in general. I dont know if
there is a specific simulation tool to deal with DRIE exclusive to etching in
general.
My experience is that SUPREM works just fine for simulating etching mems
materials.
regards,
Nimo
--- On Mon, 6/7/10, yasser sabry wrote:
From: yasser sabry
Subject: [mems-talk] DRIE Simulator
To: "General MEMS discussion"
Date: Monday, June 7, 2010, 10:50 AM
Dear All,
I'm looking for a good DRIE simulator.
I'll be grateful if you give me your experience with different simulators..
Thanks in advance,
Yasser Sabry