John,
I use both BCl3 and SF6 everyday in my RIE. You didn't state whether
you are etching GaAs and want to stop on AlGaAs or the other way
around. I also need to know you Al%
Brent
John Montoya wrote:
> Hello everyone.
>
> I am trying to perform a selective GaAs / AlGaAs etch. I
> recently put in a request to my cleanroom manager to
> incorporate SF6 and BCl3 onto our PlasmaTherm SLR750
> series ICP/RIE machine. For some unexplained reason, I
> was denied from putting SF6 and BCl3 onto our machine.
> Does anyone know of any safety or contamination issues
> associated with these two gases? Please help.
>
> Sincerely,
> John