Dear All,
Is there a recipe to etch SiO2 isotropically using RIE? I use to do wet
etching, but my Cr/Au (8nm/150nm) film peeled off after 2mins 1:10 HF etching.
I was able to do wet etching without peeling off for Cr/Au (5nm/50nm) film.
Thick films bring me trouble.
Thanks,
Hao