Hello
To use
KOH silicon etch ; You can protect the back side of the
wafer by the LPCVD nitride who is better than PECVD .and then use these
three methods :
1.
Protective Tapes
2.
Wafer Holder
3.
Black Wax
The best
option for frontside protection is a coat of Black Wax to prevent
from broken and contamination wafer ,after etching silicon
with KOH you can remove the wax with Toluène solution very easy .
Naitbouda
abdelyamine
anaitbouda@cdta.dz
Process Engineer in the Dry etch area
of the Clean Room of the CDTA
Centre de Developpement des Technologies Avancées
Cite du 20 Aout 1956 Baba Hassen,Alger,Algerie