SiH2Cl2 is routinely used in LPCVD; can it also work in PECVD? Also, have you considered a liquid source - like TEOS? I've worked at a company that used TEOS to deposit PECVD oxide. Dan -----Original Message----- From: mems-talk-bounces+dan.ruiz=honeywell.com@memsnet.org [mailto:mems-talk- bounces+dan.ruiz=honeywell.com@memsnet.org] On Behalf Of Javier Sesé Sent: Friday, September 17, 2010 11:29 AM To: General MEMS discussion Subject: [mems-talk] PECVD SiN wiithout Silane? Hi all, Silane gas is very dangerous even when diluted at 1%. Does any one know any recipe to grow Silicon Nitride in a PECVD machine without including Silane gas? Thank you, Javier