Hello, i m wondering how the KMPR 1000 DRIE performance as a mask on Silicon
instead of SU8 ? For my applications i achieve 1:10 selectivity for Si:SU8, and
how about the KMPR 1000? i haven't bought it yet. I have already search it on
internet but couldn't find anything. if there is any information i need for
that.
Thank you
Ragip Abdullahoglu
Biomems Lab.
Istanbul Technical University