Polyimide swells in water, bases and organic solvents though we've often
done lift-off on it with no problems in acetone. If you bake it (say
115C for 5 min) after the lift-off the swelling should go down. Of
course, to maximize dimensional stability you should fully cure it. If
you have a "dirty" tube furnace available, you can fully cure it in
there. We've also cured it under a nitrogen blanket on a hotplate.
Good luck,
Michael
>>> James Paul Grant 11/2/2010 12:22 PM >>>
Hello all,
Doeas anyone have any experience of partially inidized polyimide? I
have been using HD Microsystems PI2545 polyimide and been cutting a few
corners by doing the final cure at 180oC in a nitrogen purged convection
oven. However the PI2545 data sheets says to do a final cure for 1 hour
at 400oC.
In subsequent lithography steps I have used lift-off using acetone and
noted that the polyimide seems to swell in certain sections. After
immersing the sample in acetone for 3 days at room temperature there
are 200-300 nm thick ridges visible all over the sample.
Anyone got any thoughts? I can provide more details/pictures if
necessary.
Thanks,
James
--
Dr. James Paul Grant
Postdoctoral Research Associate
Microsystems Technology Group
76 Oakfield Avenue Room 205
School of Engineering
University of Glasgow
Glasgow
Scotland
G12 8LS
Telephone: +44(0)141 330 6690
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk