WC of 5 micron thickness may curl due to stress. I think it is difficult
even by CVD.
Can multilayer be possible? one layer of WC and other layer say Cr and then
another layer of WC which would help release the stress as well as increase
the thickness.
Nabhiraj
On Sat, Jan 15, 2011 at 5:39 AM, Ned Flanders wrote:
> It does seem like (LP) CVD would be the best option for such a thick
> layer of tungsten carbide, though it makes me wonder about the
> stresses. There's also an ALD process for WC, and I'm pretty sure
> someone in Finland would be able to do it (the home of ALD and all),
> but 5 um is really on the thick side for ALD.
>
> In any case, I for one will be keeping an eye on this discussion, as I
> could definitely use WC myself for a project or two.
>
>
> m