For sputtering the layers on 4-inch wafers we could help you.
If you need more information contact us again!
Regards
Andreas Albrecht
Transferzentrum Mikroelektronik e.V.
In den Weiden 7
D-99099 Erfurt
Tel. +49-(0)361-44 20 660 Fax +49-(0)361-44 20 666