Tips for enhancing the adhesion:
1. Expose your PR/SU-8 film to O2 plasma for at least 60secs, and immediately
load your samples/wafers into the vacuum chamber for Al deposition.
2. Deposit the Al film at the lowest power/dep rate possible and cool down the
samples/ wafers after each deposition step.
Good luck.
Pramod Gupta
21084 Red Fir Court
Cupertino, CA 95014
Phone: (408) 253-1646
--- On Fri, 2/11/11, Sheng Zhang wrote:
From: Sheng Zhang
Subject: [mems-talk] metal deposition on SU-8
To: "General MEMS discussion"
Date: Friday, February 11, 2011, 8:01 AM
Hi, All
I need to deposit (e-beam evaporation) Aluminum on SU-8 2002 (developed),
and there are subsequent patterning steps for aluminum. Is there anything I
need to watch out? Is there any tricks to improve adhesion? Any advice would
be greatly appreciated!
Thanks!
Sheng