Bill,
Take a look at his desired feature size though. He wants a strip that
is 4 *cm* long, with the slope running the entire length of that
feature. Are you suggesting an image reversal process to provide a +22
to -22 degree angle over a total length of 4 cm?
- Kevin
On Mon, Feb 28, 2011 at 3:22 PM, Bill Moffat
wrote:
> Slopes in positive resist are easy. +22 degrees to -22 degrees from the
vertical, flood exposure allows perfect control of angle, using image reversal.
I have personally done 40 microns thick positive resist. Thicker is possible
but would need experiments. Bill Moffat.