Righeira:
What is the anti-stick layer for SU-8? On top of patterned SU8?
On Thu, Mar 17, 2011 at 7:35 AM, righeira carnegie
wrote:
> Did you use the anit-stick layer for SU-8? even if you would have used and
> still if you have problem, it may be it is because FDTS is not
> uniform. This lack of homogenity is because of a very bad hydroxylation
> of the surface of the SU-8. You should try rinsing in Sulfuric acid for
> homogenity and try the FDTS again.
>
> It works probably. just my view. I read it in a paper. email me directly
> for the paper.