Hi,
I am using the e-beam to pattern my sample,
the resulotion is not very high, just around 500nm, and my
sample is 10nm aluminum on sapphire.
It is followed by sputtering 100nm metal aluminum.
After that, I use the aceton to do the lift-off.
My problem is that the metal did not peel off as expected. I
appreciate any advice.
Thank you!