some native oxide!
On Wed, Jul 6, 2011 at 3:00 PM, 胡小东 wrote:
> Hi, all,
>
> While etching (100) silicon wafers, most of wafers were etched normally..
> But few of (100) silicon wafers of the same batch were not etched at the
> initial time. It seems that the initial reaction just didn't take place.
>
> Has anyone had this experience?
>
> Thanks!