no, i did not try the resist stripper, though i tried a water soluble
sacrificial layer but then the aqueous solution formed droplets on the surface
of glass rather than uniform layer!
Kind Regards,
Sumit Kalsi
________________________________
From: Jerry Chen
To: General MEMS discussion
Sent: Thu, 11 August, 2011 9:56:31 AM
Subject: Re: [mems-talk] Spinning SU 8 over AZ9260
I also have the same problem, would like to use a sacrificial layer to
release the crosslinked SU8, AZ 40xt was used and not successful.
but did you try the AZ100 resist stripper?