Dear All,
I want to use a sheet of SU8 (<=50um) in my design, hence I have used LOR for
releasing it from the glass substrate. But after the release, SU8 sheet (50um)
was curved and it was not flexible (it broke when i tried bringing the two edges
of SU8 sheet square together). Is it supposed to be behaving this way? Has
anyone had any experience on this? Thanks a ton in advance!
Kind Regards,
Sumit