I am using SU8 2005 on 1mm thick glass substrate coated with 50nm Cr/Au.
spin coat 4krpm
bake 95C, 3min
exposure 8s
PEB: 65C, 7min
develop: 40s
I am getting a pretty rough sidewall as the picture in the following link.
Could anyone suggest what is the problem?
Thanks.
https://plus.google.com/u/0/photos/113316121597573259487/albums/5672855410267307
473
Thanks