Dear Group:
I wanna know how to deposite and pattern the PZT thin film (10~20um) on
the silicon or electrode metal.
I found some information about deposition of piezo material from
database of discussion groups.
Someone say the PZT film obtained from deposition is much worse property
than bulk PZT.
I wanna know the different properties among PZT films obtained from
different fabrication methods and what is solid freeform fabrication, fusued
deposition of ceramics.
I cannot find the proceedings of SFF which has several papers I want for
exaple, "Fused Deposition of Ceriamics and Metals : An overview".
Thanks for your kindness.
Sincerely,