the deposition speed of the passive layer during DRIE process
Xin Yan
2012-05-07
Hi everyone,
i want to use the -[CH2]-n polymer deposited during DRIE process to be
the protective layer,
Could somebody have such experience to deposited the -[CH2]-n polymer by
DRIE machine? what's the deposition speed?
Any suggestion will be appreciated!
Best Regards,
--
Yan Xin
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