We need to evaluate thin film material reliability for accelerated wear (on Si
wafers/coupons) under high temperature and high pressure environment. We
currently have an autoclave that can produce high temperature, high pressure and
high humidity environment, but not dry. We also need higher pressure than we
can currently achieve (i.e. 250psi and 300C). Does anyone know of an equipment
manufacturer, or a service providing vendor with equipment suitable for this
type of testing?
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