Make sure you have an i-line filter in you mask aligner. Mask contact is
also critical. Thick layers can bow the wafer and cause problems with
contact. Allow the resist to rest after spinning and ramp all bake steps
(up and down) to avoid excessive stress.
There are other tricks such as exposing from the back side through a glass
substrate to achieve these structures.
On 14 January 2013 00:18, Nirmal Punjabi wrote:
> Greetings for the day.
> I want to make SU-8 structures with high aspect ratios ~20:1.
> I want to make structures having width upto 10um & thickness of 200um.
> I am using SU-8 2100.
> Does anybody has some experience in fabricating high aspect ratios
> structures in SU-8?
> Any experiential tips in this regard will be highly appreciated.
> Thank you.
> Nirmal Punjabi
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