Much of your design will depend on the temperatures you would like to
reach. What type of sensor will this be, e.g. metal oxide,
chemo-capacitor, chemo-resistor? Hot plates on the micro-scale can be
tricky to properly thermally isolate so that a uniform target temperature
is reached with a reasonable power budget and time constant. For low
temperature hotplates (<325 deg C) we have had good luck with low stress
polyimides as the heater support material though for higher temperatures
you will need a material like stress compensated silicon nitride (or
carbide). I can provide references depending on which variety you are
On Thu, Jan 17, 2013 at 1:39 PM, Andrea Mazzolari wrote:
> Good morning,
> i'm interested to learn about fabrication processes of micro hot plates,
> typically used in gas sensing.
> Any advice on the most advances silicon micromachining processes and
> technology used for micro hot plates fabrication ?
> Best regards,
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