What's the best way to FIB SU-8, pre-cure or post-cure?
I heard yesterday that SU-8 won't mill in a FIB, that it will just
swell, then I read this paper from 2002 that's cited all over the
place saying they were able to cut SU-8 with a FIB just fine (but they
give no more info than that).
"SU-8 photoplastic structures can also be trimmed by using a laser or
focused ion beam (FIB) as shown in ﬁgure 10"
The guy with the FIB said you should be able to expose SU-8 with the
FIB though... so if you cannot in fact mill cured SU-8, I'm thinking I
can expose SU-8 with micro features with my DLP microscope aligner,
then quickly move it into the FIB to expose some nano features, before
I haven't started experimenting yet, but I will in the next few weeks.
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