Hello,
I am trying to process 4um of SU8 3005,and am having issues with the
footing at the bottom of my pattern, I t is about 1-1.5 microns. I have tried
several things and nothing seem to fix this problem, I am about to try CEM, but
am wondering if there is an alternative way to prevent this ,maybe reduce the
PEB ? Thank you
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk