Dear folks,
I am doing multilayer coating using negative photo
resist(SU -8) May i know what will be soft baking temperature and its
duration for 2nd layer and other. In Microchem datasheet , information is
about mono layer soft baking and PEB. Will it be same for other layer too ?
Thanking you.
--
With Regards,
Rajiv Panigrahi
Research Scholar
CeNSE, IISc, Bangalore (India)
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