I have some questions about SU-8 developer. Recently, I have shortage of SU-8
developer (bought from MicroChem). Then, I found that the main ingradient is
PGMEA, then I bought a bottle of 99+% PGMEA and hope that it can substitute the
SU-8 developer (also it is much cheaper). However, I found that the dissolving
rate is not constant over large structure (30-40um) and small structure (15um)
on a sample of 5um thick (developed for 1 minutes). Small structure seems need
more time to dissolve.
My question is are there any difference between SU-8 developer from MicroChem
and pure PGMEA? I also look at the MSDS of SU-8 developer, it has 2 chemicals
but 99.5% is PGMEA, 0.5% is a 2-methoxypropanolacetate. I would like to know
that this 0.5% would make the big difference? Thanks.
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