Hi, I want to do a cost analysis of my MEMS device using a foundry service.
Since I fairly new to this field, I am not familiar with the how much it
would charge for some processes.
So I am wondering if anyone can give me a price estimate on the following
processes (per 4 inch wafer, or any other charging standard)?
1. Back side anisotropic etching
2. Thermal evaporation
4. Polyimide substrate deposition and pattern
5. XeF2 release
Thanks very much
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