dose anybody use SU-8 2050 to make 100um of thickness, I have totally
adhesion failure when I deposit it on a Omnicoat(from Microchem
too)surface on Si, when I do the development, the patterns can be
removed by twizzer, I made up to 550mj/cm2 of exposure, and PEB 95C 12
min, it still didn't work. I don't know where the problem is.
Thanks for your help
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