Dear MEMS researchers,
do you know of a wet etchant that would remove ALD TiO2 from silicon? Some
of my colleagues told me that they don't know of anything suitable for ALD
films of TiO2 - only TiO2 nanoparticles. Incredulous, I hit google, but
came up with nothing - apparently, continuous films of TiO2 are quite a
challenge to etch with wet etchants.
Would any of you have a recipe that was tested as working with ALD TiO2?
Aalto University, Dept. of Materials Science and Engineering
Micronova, Tietotie 3
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org